这款无窗的硅漂移能谱仪专为TEM而设计,使用时可以获得0.3-0.7的立体角*。它可以高效且敏感地探测、接收以及处理在整个能量范围内的X射线,这意味着这款能谱仪可以在相同条件下获得比以往更高的计数率,因此它的优越性在应用于轻元素分析时更加明显。

  • X-MaxN TSR是常规200 kV场发射电镜的理想能谱仪:
  • 对轻元素的探测敏感性提高了3倍;
  • 在低能X射线范围内的表现、峰/背比以及分辨率等方面都有高质量的保障。

*取决于探头结构、极靴以及电镜型号。在TEM中能谱仪的最重要的技术指标就是其能达到的最大立体角,而这个数值与电镜和极靴的设计紧密相关。X-MaxN TSR的设计采用了优化的探头晶体与样品间的距离,并因此最大限度的获得高角度的立体角。

Brochures and Application Notes

AZtecTEM solutions brochure

A 16 page brochure showing why AZtecTEM is the most powerful solution for EDS on the TEM. It comprises software and hardware sections (inc X-Max 100TLE and X-Max TSR).

PDF 4.63MB
Semiconductor analysis in the TEM
Development and testing of semiconductor devices requires extensive knowledge of local structure and elemental composition. With feature sizes of <5 nm, it is often necessary to perform imaging and EDS analysis in a S/TEM.
 
Once in the TEM, there are still many difficulties to be overcome to acquire accurate elemental maps. Elemental analysis of semiconductors is typically difficult due to strong overlaps of X-ray lines between commonly used elements and low concentrations of dopants. Not only are concentrations of dopants small but their X-ray lines often overlap with other materials used in semiconductor processing. This brief shows how AZtecTEM solves these overlaps to achieve an accurate elemental analysis.
PDF 3.27MB
EDS for TEM Explained
This 12 page document gives an introduction to EDS applications in the Transmission Electron Microscope (TEM). It covers the theory of the SDD operation and X-ray analysis.
 
This document is available in bulk free of charge to universities and other institutions giving a course on the subject.
PDF 4.04MB

相关产品

TEM专用的能谱软件—AZtecTEM

TEM专用的能谱软件—AZtecTEM

AZtecTEM EDS microanalysis software is packed with innovative tools and technologies that transform the the characterisation of materials in the TEM

TEM专用硅漂移探头:X-MaxN 80T

TEM专用硅漂移探头:X-MaxN 80T

Specially designed to maximise EDS performance in the TEM, with a large-area 80 mm2 sensor, the X-MaxN 80 T optimises solid angle and analytical performance.

TEM用硅漂移探头(SDD):X-MaxN 100TLE

TEM用硅漂移探头(SDD):X-MaxN 100TLE

Our flagship SDD detector for TEM, the X-MaxN 100TLE provides the perfect solution for field emission and abberation corrected TEMs working at the frontiers of nanoscience.

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