PlasmaPro 800Plus Processes

This versatile system can be confiugured for a wide range of processes including:

  • HBLED production processes for hard mask deposition and etch and passivation deposition
  • 300mm failure analysis and wafer-scale de-processing solutions
  • SiO2 and SiNx deposition and etch
Contact us for more details or to discuss your individual process requirements.