Product Features

  • The PlasmaPro HBLED range of etch and deposition tools provides outstanding benefits for HBLED manufacturers
  • 490mm electrode giving unparalleled throughput from industry leading batch sizes of up to 7 x 6” wafers
  • High quality device performance and yield
  • Reliable hardware and ease of serviceability for excellent uptime
  • Low cost of ownership
  • Optimised for batch production, the NGP1000 has a vacuum load lock as standard, with open load and cluster capability options
  • System designed to minimise cleaning overhead