Aluminium Nitride (AlN) Sputter Deposition

TiN has may be deposited using Physical Vapour Deposition (PVD), also known as Sputter Deposition.

Process Specification

  PlasmaPro System400
Deposition rate: > 4nm min
Refractive Index: 2.0 - 2.2 (controllable)
Uniformity: ± 5% (200mm Target Size)
Single wafer size: Up to 150mm
Batch size: 4 x 150mm or 8 x 100mm