Features of the PlasmaPro RIE product family

Feature                    PlasmaPro NGP80 RIE PlasmaPro 800Plus RIE PlasmaPro 100 RIE PlasmaPro System133 RIE
Electrode Size 240mm 460mm 240mm 330mm
Loading Open Load Open Load Load Locked Load Locked
Substrates See product brochure See product brochure 200mm with carriers options available for multi-wafers or small pieces 300mm with carriers options available for multi-wafers or small pieces
MFC controlled gaslines 8 or 12 line gas box available 8 or 12 line gas box available 8 or 12 line gas box available 8 or 12 line gas box available
Wafer stage temperature range 10-80C°  10-80C° Minus 20C° to 80C° Minus 20C° to 80C°
He Back side cooling option  yes no yes no
ICP Option yes no no no
Focused Plasma yes yes no no