RIE-PE System Features

Feature PlasmaPro NGP80 PlasmaPro System800Plus
Electrode size 240mm 460mm
Loading Open Load Open Load
Substrates See product brochure See product brochure
MFC controlled gaslines 8 or 12 line gas box available 8 or 12 line gas box available
Wafer stage temperature range 10-80C° 10-80C°
He Back side cooling option yes no
ICP option yes no
Focused plasma yes yes