PlasmaPro ICP etch product family

 

  PlasmaPro 80 PlasmaPro 100
Feature  Cobra65 Cobra65 Cobra180 Cobra300 Estrelas Polaris Please contact us for details
Electrode size: 240mm plasma uniform over central 40mm 240mm 330mm
Loading: Manual or Loadlock Loadlock or Cassette
Wafer size: Up to 50mm (2")* Up to 100mm* Up to 200mm Up to 300mm with carrier options available for multi-wafers*
MFC controlled gaslines: 8 or 12 line gas box available 3 - 5 close coupled gas lines with option for 8 - 12 external 8 or 12 line gas box available
Wafer stage temperature range: -150 to 400ºC -150 to 350ºC

*with carrier options available for small pieces