With the MEMS industry expected to see double digit growth up to 20161, the development and commercialisation of new MEMS applications is becoming a reality.

Traditional devices such as accelerometers, gyroscopes and microphones continue to see increased adoption in many consumer electronics, displays and automotive applications. 

The reality is that MEMS can provide a solution where there is a requirement for a device or sensor to be miniaturised2
Devices emerging in the R&D phase include energy harvesting; speakers; RFID; pico projectors; oscillators; micro fuel cells; and autofocus technologies amongst others3

Oxford Instruments Plasma Technology continues to provide technologies that address existing and emerging applications in the MEMS market.  With a broad process and application portfolio our technologies enable many of the applications identified today and those of tomorrow

1. (isuppli corp), 2. (A.M. Fitzgerald and Associates), 3. (Yole Development)

Process Technologies offered to the MEMS market sector include:




LayerProbe is a thin film analysis tool tool that measures the thickness and composition of multiple layers in thin film structures in the SEM. It is an extension to AZtec EDS analysis.