Information Communication Technology for Compound Semiconductor devices

Compound Semiconductor devices play a pivotal role in a number of industries including:

  • Wireless
  • Consumer electronics
  • Automotive
  • Defence
  • Telecommunications

Oxford Instruments Plasma Technology is a leading supplier of process tools compatible with research and production environments.  With over 25 years experience developing low damage processes for front side applications and as well as high rate applications for backside via processes, our technologies are compatible with all materials related to this market.  Our ion beam products offer leading edge results for grating etches such as those found in DFB lasers and our ion beam deposition product offers leading optical coating technologies.